Waferpedia

Comparison ledger

.498 PSL WaferversusX'Pert MRD

KLA .498 PSL Wafer, Malvern Panalytical X'Pert MRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
X'Pert MRDMalvern Panalytical
OEMKLAMalvern Panalytical
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferMalvern Panalytical X'Pert MRD
Specifications
ConfigurationNIST Traceable[1]—
NIST traceabilityYes[1]—
Type—X-ray Diffractometer (XRD)[2]
Vintage—2010[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing