Waferpedia

Comparison ledger

.498 PSL WaferversusD 9600 C-SAM

KLA .498 PSL Wafer, Sonoscan D 9600 C-SAM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
D 9600 C-SAMSonoscan
OEMKLASonoscan
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferSonoscan D 9600 C-SAM
Specifications
ConfigurationNIST Traceable[1]—
NIST traceabilityYes[1]—
AC Voltage—100–240 V, 50–60 Hz[2]
FLA—11.3 A[2]
Largest Load—8.33 A[2]
Main O/C—15 A[2]
SCCR—5 kA[2]
Phase—Single[2]
Wiring—2‑wire + Ground[2]
Operator Manual—A600158[2]
Service Manual—A600159[2]
Frequency—50–60 Hz[2]
25 MHz F2 Transducer—0.50 inch (12.7 mm) focal length[2]
50 MHz F2 Transducer—0.50 inch (12.7 mm) focal length[2]
50 MHz F3 Transducer—0.75 inch (19.1 mm) focal length[2]
Low-Frequency Pulse Transducer—0.500 inch focal length, SK 230/LP, 2019 vintage[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing