Waferpedia

Comparison ledger

.498 PSL WaferversusScientific Spectra Ultra 5.0 STEM

KLA .498 PSL Wafer, Thermo Fisher Scientific Spectra Ultra 5.0 STEM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAThermo Fisher
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferThermo Fisher Scientific Spectra Ultra 5.0 STEM
Specifications
ConfigurationNIST Traceable[1]—
NIST traceabilityYes[1]—
Type—Scanning Transmission Electron Microscope (STEM)[2]
Manufacturer—Thermo Fisher Scientific[2]
Model—Spectra Ultra 5.0[2]
Wafer sizes—12 inch[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing