Comparison ledger
KLA .498 PSL Wafer, Zygo Newview 7300 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Zygo |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2012 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Zygo Newview 7300 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 1X, 5X Objectives[2] |
| NIST traceability | Yes[1] | — |
| measurement technique | — | Non-contact, three-dimensional, scanning white light interferometry[4] |
| scanner | — | Closed-loop piezo-based, with highly linear capacitive sensors[4] |
| objectives | — | 1X, 2.5X, 5X, 10X, 20X, 50X, 100X[4] |
| objective mounting options | — | Single objective dovetail; manual 6-position turret; motorized 6-position turret[4] |
| field zoom lenses | — | 0.5X, 0.75X, 1.0X, 1.5X, 2.0X[4] |
| image zoom | — | Motorized 3-position system zoom[4] |
| field of view | — | 0.03 to 14 mm; larger area imaged with field stitching[4] |
| illuminator | — | Single white-light LED design[4] |
| measurement array | — | Selectable 640x480, 320x240, 160x120; optional 992 x 992 (1K)[4] |
| focus | — | Motorized manual and auto focus[4] |
| z-drive | — | DC brushless microstepper motor with ballscrew drive, 4 in. range, 0.1 μm resolution[4] |
| computer | — | High-performance Dell PC with LCD monitor[4] |
| software | — | ZYGO MetroPro software running under Microsoft Windows XP[4] |
| vertical scan range | — | 150 μm[4] |
| extended scan range | — | 20 mm[4] |
| vertical resolution | — | < 0.1 nm[4] |
| lateral resolution | — | 0.36 to 9.5 μm[4] |
| data scan rate | — | ≤135 μm/sec[4] |
| maximum data points | — | 307,200; 984,064 optional[4] |
| rms repeatability | — | < 0.01 nm[4] |
| step height accuracy | — | ≤ 0.75%[4] |
| repeatability | — | ≤ 0.1% @ 1σ[4] |
| test part characteristics | — | Opaque, transparent, coated, uncoated, specular, and nonspecular surfaces[4] |
| maximum sample size | — | 3.5 x 8 x 8 in. (89 x 203 x 203 mm); larger sample sizes possible[4] |
| reflectivity | — | 1-100%[4] |
| temperature | — | 15 to 30°C[4] |
| humidity | — | 5 to 95% relative, noncondensing[4] |
| input voltage | — | 100 to 240 VAC, 50/60 Hz[4] |
| compressed air | — | 60 to 80 psi; dry and filtered source; 1/4 in. input[4] |
| stated objectives in inventory listing | — | 1X, 5X objectives[2] |
| stated scan length in inventory listing | — | 150 µm scan length[2] |
| stated camera in inventory listing | — | 640 × 480 high-resolution CCD camera[2] |
| stated image zoom in inventory listing | — | Automated, motorized 3-position image zoom[2] |
| stated light source in inventory listing | — | High-output, long-life white light LED light source[2] |
| stated software and computer in inventory listing | — | MetroPro software, Windows XP, and computer[2] |
| stated stage in inventory listing | — | Motorized 3-axis stages, XY and Z[3] |
| stated software in inventory listing | — | MetroPro 8.3.5 on Dell Windows XP computer[3] |
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