KLA
Alpha Step 500 alternatives
Comparable Metrology & Inspection equipment documented in the Waferpedia catalog.
6 comparable tools
Filmetrics
F50
150mm
Metrology & Inspection
The Filmetrics F50 is an optical film thickness and wafer-mapping system for thickness and optical property measurements on substrates.
KLA
P/N: 0023889-00 Wafer Vacuum Chuck
150mm
Metrology & Inspection
KLA P/N: 0023889-00 is a wafer vacuum chuck compatible with KLA SP1 Classic, SP1-TBi, and SP1-DLS systems.
KLA
SFS 6420 Wafer
150mm
Metrology & Inspection
The KLA SFS 6420 is a wafer inspection system for non-patterned particle detection, compatible with 150 mm and 200 mm wafers, using an Algon laser source.
KLA
.204 PSL Wafer
Metrology & Inspection
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA
.496 PSL Wafer
Metrology & Inspection
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
KLA
.498 PSL Wafer
Metrology & Inspection
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
Compare interactively
Need a side-by-side spec table? Open the compare tool to pick any two models.
Compare Alpha Step 500 with another model →