Comparison ledger
KLA OP 5240 Film Thickness Measurement, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | |
|---|---|---|
| OEM | KLA | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA OP 5240 | Ultratech 1000 Family |
| Specifications | ||
| Configuration | Patterned, unpatterned[1] | — |
| Voltage | 230 V, 50/60 Hz[1] | — |
| Software Revision Level | TFMS Rev 4.1a32[1] | — |
| 1 Prealigner, Brooks, Model | PRE-201-CE[1] | — |
| 1 ATM-Robot, single EEF, Brooks, Model | ATM-105-1-DE (controller ESC-212)[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[2] |
| Optical design | — | Wynne Dyson[2] |
| Magnification | — | 1X[2] |
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