Waferpedia

Comparison ledger

IPEC 372 Mversus12 Lapper

Lam Research IPEC 372 M, Lapmaster 12 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
IPEC 372 MLam Research
12 LapperLapmaster
OEMLam ResearchLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPEC 372 M—
Specifications
CategoryCMP[1]—
Wafer Size8 inch (200 mm)[1]—
TypeAutomated Wafer Polishing System[2]—
OEMLam Research[1]—
ModelIPEC 372 M[3]—
Wafer sizes8 inch[3]—
Tool typeAutomated wafer polishing system[1]—
Also referred to asIPEC 372M Avanti[1]—
Outside plate diameter—12 inches[4]
Lapping Speed Range—0 to 60 rpm[5]
Wafer Size Compatibility—4 inches or smaller[4]
Input Voltage—110 V[4]
Frequency—60 Hz[4]
Phase—1[4]
Number of Rings—3[4]
Number of Weights—3[4]
Includes Slurry System—Yes[4]
Includes Timer—Yes[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]Equipment inventory listing
  4. [4]jmind.comjmind.com
  5. [5]etd.ohiolink.eduetd.ohiolink.edu