Waferpedia

Comparison ledger

IPEC Avanti 472versus1 DP 41

Lam Research IPEC Avanti 472, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
IPEC Avanti 472Lam Research
1 DP 41Logitech
OEMLam ResearchLogitech
CategoryCMPCMP
Wafer sizeSingle wafer—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPECLogitech 1 DP 41
Specifications
ConfigurationFully automated[1]50/60 Hz[2]
Wafer sizeSingle wafer[1]—
Phase—3 Phase[2]
Voltage—480 V[2]
Make—Logitech[2]
Model—1 DP 41[2]
Frequency—50/60 Hz[2]
Current—12 amps[2]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing