Waferpedia

Comparison ledger

IMP HEAT Medium Currentversus160 XP Ion

Nissin IMP HEAT Medium Current, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMNissinVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNissin IMP HEAT Medium CurrentVarian 160 XP Ion
Specifications
Configuration—150mm High Current IMP[1]
OEM—Varian[2]
Model—160 XP Ion[2]
Category—Ion Implantation[1]
Tool type—ion implanter[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing