Comparison ledger
Novellus 300, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 300Novellus | 1000FPYES |
|---|---|---|
| OEM | Novellus | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | 300mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Novellus 300 | YES 1000FP |
| Specifications | ||
| Target tool size | 300 mm tools[1] | — |
| User interface | Proteus user interface[1] | — |
| Platform function | High-resolution data collection and management, advanced equipment applications, advanced factory automation, and remote e-diagnostics connectivity[1] | — |
| Modules | Athena Knowledge Base (AKB), Athena Advanced Factory Automation (AFA), Athena Remote (AR)[1] | — |
| AKB capabilities | Statistical Process control, equipment fault monitoring and notification, sensor integration, and remote connectivity for e-diagnostics[1] | — |
| AFA standards and interfaces | SEMI standards for Equipment Data Acquisition (EDA) "Interface A"; connections to Modbus and HSMS[1] | — |
| AR function | Enables access to the Novellus tool GUI and the ATHENA KB GUI from a computer outside of the cleanroom[1] | — |
| System type | — | Plasma cleaning system[2] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[2] |
| Model | — | Glen/YES 1000FP[2] |
| Designed use | — | Designed to accept a range of shelf sizes[2] |
| Application focus | — | Changing needs of the flat panel industry[2] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →