Comparison ledger
Pfeiffer ATH1603M, Temescal FC-2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ATH1603MPfeiffer | FC-2000Temescal |
|---|---|---|
| OEM | Pfeiffer | Temescal |
| Category | Deposition | Deposition |
| Wafer size | 100mm | 100mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Pfeiffer ATH1603M | Temescal FC-2000 |
| Cited variants | ||
| Specifications | ||
| Role | Turbo pump[7] | — |
| System location | Chamber secondary pump[7] | — |
| Associated system | EVA 451 thermal evaporator[7] | — |
| Supported wafer sizes in associated system | 100 mm wafers; 150 mm wafers[7] | — |
| Pumping speed (N₂) | approx. 1,400–1,600 l/s[1] | — |
| Ultimate pressure | up to approx. 6 × 10⁻⁹ mbar[1] | — |
| Rated speed | 39,000 rpm[1] | — |
| Bearing type | Magnetic bearing (MagLev)[1] | — |
| Cooling | Water-cooled[1] | — |
| Inlet flange | DN250 ISO-F (with protective grille) / DN200 ISO-F[1] | — |
| Outlet flange | KF40 (NW40, ISO-KF40)[1] | — |
| Motor parameters | 44 Vrms, 1,300 Hz, 7 Arms[5] | — |
| Controller | External electronics required (e.g., MAGPOWER controller)[5] | — |
| Bearing | Magnetic bearing[1] | — |
| Motor voltage | 44 Vrms[1] | — |
| Motor frequency | 1,300 Hz[1] | — |
| Motor current | 7 Arms[1] | — |
| Country of origin | France[4] | — |
| Inlet flange (alternate) | 200 CF-F[2] | — |
| System name | — | Temescal FC-2000 deposition system[6] |
| System type | — | Bell jar deposition system[6] |
| Operation | — | Fast-cycle, load-locked system[6] |
| Vacuum handling | — | Allows the source to remain under vacuum during substrate reloading[6] |
| Source tray | — | Supports multiple electron beam and resistance sources[6] |
| Standard source-to-substrate distance | — | 19.5 in[6] |
| Optional source-to-substrate distance with extension collar | — | 27.5 in[6] |
| Bell jar diameter | — | 20 in (508 mm)[6] |
| FC-2000 source tray diameter | — | 18 in (457 mm)[6] |
| Control system | — | Temescal Control System (TCS)[6] |
| Deposition controller | — | Inficon XTC/3 deposition controller[6] |
| Electron beam power supply | — | Temescal model CV-6SLX electron beam power supply[6] |
| Beam sweep controller | — | Temescal SuperSweep64 programmable beam sweep controller[6] |
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