Waferpedia

Comparison ledger

TPH 170 Turbomolecular Vacuumversus-Mist 850 Electronic Air Filter

Pfeiffer TPH 170 Turbomolecular Vacuum, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMPfeifferTri
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPfeiffer TPHTri -Mist 850 Electronic Air Filter
Specifications
Volume flow rate170[1]—
ConfigurationHumming sound when running[1]—
Voltage110V[1]—

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing