Comparison ledger
Proton H Series Hydrogen, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | H Series HydrogenProton | 11600 SRDSemitool |
|---|---|---|
| OEM | Proton | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2019 Manufacturer upgrade | — |
| Control system | — | — |
| Generation | — | — |
| Family | Proton H Series Hydrogen | Semitool 11600 SRD |
| Specifications | ||
| Configuration | 3 HOGEN[1] | Ceramic[3] |
| Flow rate (upgraded) | 6 Nm³/hr[1] | — |
| Original flow rate | 2 Nm³/hr[1] | — |
| Upgrade year | 2019[1] | — |
| Operation time (this unit) | Approximately 18000 hours[1] | — |
| Type designation | HOGEN[1] | — |
| Equipment type | Hydrogen generator[1] | Spin Rinse Dryer[3] |
| Application | Wet processing / clean[2] | — |
| Upgrade | Upgraded by manufacturer in 2019 from 2 Nm/hr to 6 nM/hr, with retrofit power supply update[1] | — |
| Operation time | Approximately 18000 hrs[1] | — |
| Manufacturer | — | Semitool[3] |
| Model | — | 11600 SRD[3] |
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