Comparison ledger
SCREEN SU 3000, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 3000SCREEN | 003163-000 SRDSemitool |
|---|---|---|
| OEM | SCREEN | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN SU 3000 | Semitool 003163-000 SRD |
| Cited variants | — | |
| Specifications | ||
| Configuration | SR Type, SST, 3 Load Port, include HDD[1] | — |
| Wafer Size | 12 inch[1] | — |
| Type | SR Type[1] | — |
| Chemistry | DHF[2] | — |
| Load Ports | 3[1] | — |
| HDD Included | Yes[1] | — |
| Vintage (example) | 2004[1] | — |
| Process Chemistry | 2 AM 1/2 DHF[5] | — |
| Phase | 3 Phase[6] | — |
| Frequency | 60 Hz[6] | — |
| Voltage | 200 VAC[6] | — |
| Full Load | 27 kVA, 78 A[6] | — |
| Equipment type | Cleaner[1] | Spin Rinse Dryer (SRD)[8] |
| Vintage | 2004[1] | — |
| Make | — | Semitool[8] |
| Model | — | 003163-000[8] |
| Asset # | — | 139375[8] |
| Last Confirm Date | — | September 03, 2025[8] |
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