Comparison ledger
SCREEN SU 3100 Wafer, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 3100 WaferSCREEN | 003163-000 SRDSemitool |
|---|---|---|
| OEM | SCREEN | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN SU 3100 Wafer | Semitool 003163-000 SRD |
| Specifications | ||
| Configuration | 8ch[1] | — |
| Status | Failure on Part: MPC2 Shutter Plate Rotation Motor – Alarm[1] | — |
| Vintage | 2010[1] | — |
| HDD Status | No HDD[1] | — |
| Model | SU 3100[1] | 003163-000[3] |
| Make | SCREEN / DNS[1] | Semitool[3] |
| Number of Chambers | 8[2] | — |
| Number of FOUP Load Ports | 4[2] | — |
| HDD | No HDD[1] | — |
| Equipment type | — | Spin Rinse Dryer (SRD)[3] |
| Asset # | — | 139375[3] |
| Last Confirm Date | — | September 03, 2025[3] |
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