Comparison ledger
Semics Opus 3 SLT, Signatone 1070, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Opus 3 SLTSemics | 1070Signatone |
|---|---|---|
| OEM | Semics | Signatone |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semics Opus 3 SLT | Signatone 1070 |
| Specifications | ||
| Type | Automatic[1] | — |
| Accuracy | 1.5 µm[1] | — |
| Chuck size | 175 x 200 mm[1] | — |
| Operating temperature | -40 to 200 °C[1] | — |
| Probing force | 230 kgf[1] | — |
| Overall dimensions | 1485 x 1720 x 960 mm[1] | — |
| Wafer size | 8 inches, 12 inches[1] | — |
| Test temperature range | -55 °C to 200 °C[2] | — |
| Test temperature accuracy | ±1 °C[2] | — |
| Chuck load capacity | 200 kg[2] | — |
| Wafer Sizes Supported | 8 inches, 12 inches[2] | — |
| Test Temperature Range (Alternative) | -40 °C to 200 °C[1] | — |
| System Overall Accuracy | ±1.5 µm[2] | — |
| System Overall Accuracy (Alternative) | 1.5 µm[1] | — |
| Chuck Flatness | within 15 µm[2] | — |
| Die Size Range | 0.2 mm to 100 mm[2] | — |
| Acceptable Wafer Bow | 2 mm for 8-inch and 12-inch wafers[2] | — |
| MTBF | > 180 hours[2] | — |
| OCR Image Recognition and Auto Needle Alignment | Yes (upward-looking camera, fully automatic)[2] | — |
| GPIB Communication | Yes[2] | — |
| Mapping Format Compatibility | TSK, TEL, OPUS[2] | — |
| Cleaning Modes | CLEAN PAD (100 mm x 200 mm), CLEAN WAFER (8 & 12 inch)[2] | — |
| Remote Control | TeamViewer, VNC[2] | — |
| Manufacturer | Semics Inc.[2] | — |
| Model | Opus 3 SLT[3] | 1070[4] |
| Operating Temperature | -40 to 200 Degree C[1] | — |
| Equipment Name | 高低温全自动探针台-Opus 3 SLT[2] | — |
| Instrument Number | 22007413[2] | — |
| Origin | Korea[2] | — |
| Temperature Range | -55℃~200℃[2] | — |
| Temperature Accuracy | ±1℃[2] | — |
| System Accuracy | ±1.5 um[2] | — |
| Make | — | Signatone[4] |
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