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003163-000 SRDversus304 SST Batch Wafer Processing

Semitool 003163-000 SRD, Wafab 304 SST Batch Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
003163-000 SRDSemitool
304 SST Batch Wafer ProcessingWafab
OEMSemitoolWafab
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 003163-000 SRDWafab 304 SST Batch Wafer Processing
Specifications
MakeSemitool[1]Wafab[2]
Model003163-000[1]304 SST[2]
Equipment typeSpin Rinse Dryer (SRD)[1]—
Asset #139375[1]—
Last Confirm DateSeptember 03, 2025[1]—
Configuration—96"[2]
Wafer size—6 inch[4]
003163-000 SRD entry304 SST Batch Wafer Processing entryAsk about these tools →Share experience with this comparison →

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing