Comparison ledger
Ultratech 1000 Family, Ultratech Titan 4700, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | Titan 4700Ultratech |
|---|---|---|
| OEM | Ultratech | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Ultratech 1000 Family | Ultratech Titan 4700 |
| Specifications | ||
| Tool type | Photolithography step-and-repeat 1X stepper[1] | — |
| Optical design | Wynne Dyson[1] | — |
| Magnification | 1X[1] | — |
| Optics | — | G and H line[2] |
| Lamp Power | — | 1000 W[2] |
| Extended Focus Option | — | Yes (for thick resist exposure)[2] |
| Wafer Sizes Supported | — | 4 inch, 5 inch, 6 inch, 8 inch[2] |
| Reticle Size | — | 5 inch (upgradable to 6 inch)[2] |
| Maximum Field of View | — | 44 mm x 26.7 mm[2] |
| Numerical Aperture | — | 0.32[2] |
| Robot | — | Genmark[2] |
| Machine Vision System | — | Cognex[2] |
| Reticle Bar Code Reader | — | Yes[2] |
| Auto Aperture | — | For 2 or 3 field reticles[3] |
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