Comparison ledger
ABM -407B-1-S-CES293 Robot, Leybold D 40 B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | D 40 BLeybold | |
|---|---|---|
| OEM | ABM | Leybold |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Leybold D 40 B |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[3] | — |
| Description | ROBOT[3] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[3] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[3] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[3] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[3] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[3] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[3] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[3] | — |
| Type | — | Two-stage (dual-stage) oil-sealed rotary vane vacuum pump[2] |
| Nominal pumping speed | — | 46 m3/h (27.1 cfm)[2] |
| Pumping speed | — | 40 m3/h (23.6 cfm)[2] |
| Pumping speed displacement | — | 32.5 CFM[5] |
| Displacement | — | 30 cfm[1] |
| Ultimate partial pressure without gas ballast | — | 10^-4 mbar (0.75 x 10^-4 Torr)[2] |
| Ultimate total pressure without gas ballast | — | < 2 x 10^-3 mbar (< 1.5 x 10^-3 Torr)[2] |
| Ultimate pressure | — | ≤ 2 x 10^-3 (≤ 1.5 x 10^-3)[4] |
| Ultimate total pressure with gas ballast | — | < 5 x 10^-3 mbar (< 3.8 x 10^-3 Torr)[2] |
| Water vapour tolerance | — | 40 mbar (30 Torr)[2] |
| Water vapour capacity | — | 1184 g/h[2] |
| Oil filling | — | 1.7 L min / 2.6 L max[2] |
| Noise level (DIN 45 635) | — | 57 dB(A) without gas ballast / 59 dB(A) with gas ballast[2] |
| Admissible ambient temperature | — | +12 to +40 °C[2] |
| Weight | — | 68 kg[2] |
| Connections, intake and exhaust side | — | DN 40 KF[2] |
| Inlet flange | — | DN 40 KF[1] |
| Motor | — | 3-phase, 208-460 VAC, 50/60 Hz[5] |
| Motor rating | — | 2200 W (3 HP)[6] |
| Nominal motor speed | — | 1430 min-1 (50 Hz); 1735 min-1 (60 Hz)[2] |
| Motor protection (IP rating) | — | IP55[2] |
| Part number | — | 11286 (replaces PN 91286-2)[5] |
| ATEX classification | — | Equipment Group II, Category 3 (ATEX Directive 94/9/EG); available as Categories 3 i and 3 i/o with mineral oil[2] |
| Pump length | — | 720 mm (D 40 B)[2] |
| Recommended lubricant | — | LVO 100 mineral oil (standard version); prepared for hydrocarbon oil service[1] |
| Gas ballast valve | — | Opened with position 1, closed with position 0[1] |
| Media compatibility | — | Standard versions not suited for pumping oxygen exceeding atmospheric concentration, hazardous gases, or extremely aggressive or corrosive media[2] |
| Pump type | — | Dual-stage oil-sealed rotary vane vacuum pump[2] |
| Noise level | — | 57 / 59 dB(A) without/with gas ballast[2] |
| Oil filling, min./max. | — | 1.7 / 2.6 l[2] |