Comparison ledger
ABM -407B-1-S-CES293 Robot, Tenney Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EnvironmentalTenney | |
|---|---|---|
| OEM | ABM | Tenney |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Tenney Environmental |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Temperature Range | — | -62 to +82°C (Tenney #1)[2] |
| Temperature Stability | — | ±1°C at steady state (Tenney #1)[2] |
| Temperature Accuracy | — | ±0.5°C internal sensor (Tenney #1)[2] |
| Humidity Range | — | 20% to 95% relative humidity (Tenney #1)[2] |
| Humidity Stability | — | ±5% at steady state (Tenney #1)[2] |
| Humidity Accuracy | — | ±0.5% internal sensor (Tenney #1)[2] |
| Interior Volume | — | 234 cubic feet (72" wide × 72" deep × 78" tall) (Tenney #1)[2] |
| Control System | — | VersaTenn V microprocessor with PID control (Tenney #1)[2] |
| Cooling System | — | Two-stage refrigeration system (Tenney #1)[2] |
| Heating System | — | Electric resistance heaters (Tenney #1)[2] |
| Product type | — | Environmental test chambers and walk-in rooms[3] |
| Testing capabilities | — | Temperature, humidity, altitude, vibration, and vacuum testing[3] |
| Walk-in chamber use | — | Large walk-in enclosure used to test equipment under simulated environmental conditions[2] |
| Temperature range | — | -62 to +82°C[2] |
| Temperature stability | — | ±1°C (at steady state)[2] |
| Temperature accuracy | — | ±0.5°C (internal sensor)[2] |
| Humidity range | — | 20% to 95% relative humidity[2] |
| Humidity stability | — | ±5% (at steady state conditions)[2] |
| Humidity accuracy | — | ±0.5% (internal sensor)[2] |
| Interior volume | — | 234 cubic feet (72" wide × 72" deep × 78" tall)[2] |
| Control system | — | VersaTenn V microprocessor control system with PID temperature and humidity control[2] |
| Automation | — | Completely automatic[2] |
| Logging | — | Internal log function keeps a continuous record of chamber temperature and humidity[2] |
| Programmable profiles | — | Allows preprogrammed temperature/humidity profiles[2] |
| Additional test capabilities | — | Liquid, freezing, and precipitation tests[2] |
| Altitude chamber size range | — | 5 to 64 cubic feet[3] |
| Altitude chamber temperature range | — | -68°C to +177°C[3] |
| Altitude chamber humidity capability | — | 20% to 95% RH in the dry bulb range of +20°C to +85°C, limited by a 5°C dewpoint[3] |
| Altitude conditions | — | Site level to 100,000 feet[3] |
| Combined temperature and altitude | — | 60,000 feet maximum[3] |
| Altitude chamber control | — | ±0.3°C and ±2% RH[3] |