Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Comdel CLX 10 K, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | CLX 10 KComdel | |
|---|---|---|
| OEM | ABM | Comdel |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Comdel CLX 10 K |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | CLX 10 K[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Make | — | Comdel[2] |
| Type | — | Low Frequency RF Power Generator[3] |
| Power Output | — | 10 kW[3] |
| Form Factor | — | 3U rackmount[3] |
| DC Bus Input | — | 48 VDC nominal[3] |
| RF Output Connector | — | BNC connector (rear panel)[3] |
| Remote Interface | — | D-Sub connector (rear panel)[3] |
| Cooling | — | Water-cooled[3] |
| Water Flow Requirement | — | 13 L/min minimum flow[3] |
| Maximum Water Pressure | — | 552 kPa[3] |
| Maximum Water Temperature | — | 25°C[3] |
| Secondary Model | — | 27-257659-00[3] |
| MPN | — | FP1605RA[3] |
| Date of Manufacture | — | 2/10/05[3] |
| Revision | — | A[3] |
| Cooling Method | — | Water-cooled[4] |
| Model Number (Secondary) | — | 27-257659-00[4] |
| Manufacturer Part Number (MPN) | — | FP1605RA[4] |
| Dimensions | — | 27" x 19" x 6"[3] |