Comparison ledger
Accretech APM 90 A, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | APM 90 AAccretech | 1007KLA |
|---|---|---|
| OEM | Accretech | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech APM 90 | KLA 1007 |
| Specifications | ||
| CPU | AVME 127[1] | — |
| Chuck System | TSK Hot Chuck 30-155 C[1] | — |
| Chuck Planarity | <15 um[2] | — |
| PC Adapter | Diameter 200 mm, Clamped Manually[1] | — |
| Manipulator | N/A[1] | — |
| Manufacturer | Accretech[1] | KLA[4] |
| Model | APM 90 A[1] | 1007[4] |
| Category | Test & Probe[1] | — |
| Tool type | Prober[1] | — |
| Wafer size compatibility | 6-inch and 8-inch wafers[3] | — |
| Chuck planarity | <15 um[1] | — |
| Vintage | 1996[1] | 01.06.1995[4] |
| Description | — | Wafer Prober[4] |
| Wafer size | — | 150 mm[4] |
| Convertible to 8 inch wafer size | — | Yes[4] |
| Make | — | KLA[5] |
| Equipment type | — | Prober[5] |
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