Comparison ledger
Accretech UF 3000 EX Automatic Wafer, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | UF 3000 EX Automatic WaferAccretech | 1007KLA |
|---|---|---|
| OEM | Accretech | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech UF 3000 | KLA 1007 |
| Specifications | ||
| OS Ver | S6.39.BH[1] | — |
| Input | AC 210V Single pulse[1] | — |
| Configuration | 12" Nickel Hot Chucktop[1] | — |
| Head Plate Center Hole Size | 528mm[1] | — |
| Type | Automatic wafer prober[2] | — |
| Hot temp controller | Room~150C[1] | — |
| OS version | S6.39.BH[1] | — |
| Chucktop | 12" Nickel Hot Chucktop[1] | — |
| Z stage | Standard Z Force Stage[1] | — |
| Loader | Open Foub Single Loader[1] | — |
| OCR | Type 6 OCR (Rear-Face Only)[1] | — |
| Probe card tray | Auto Probe Card Tray (O)[1] | — |
| Cleaning unit block | Cleaning Unit Block (O), Cleaning Ceramic Plate(X)[1] | — |
| Ports | USB Port; Ethernet Port[1] | — |
| Card holder clamp motor option | No[1] | — |
| Auto tilt option | No[1] | — |
| Configured wafer sizes | 8" or 12" wafers[3] | — |
| Chuck type | Nickel[3] | — |
| FOUP port | Single FOUP port for 25 wafers[3] | — |
| Transport | Dual robotic wafer transport arms[3] | — |
| Alignment | Auto needle alignment; advanced wafer alignment unit; alignment camera E1-500[3] | — |
| Stage | Quad-Pod Z stage[3] | — |
| Interface options | GPIB interface option; Ethernet interface option[3] | — |
| Manufacturer | — | KLA[4] |
| Model | — | 1007[4] |
| Description | — | Wafer Prober[4] |
| Wafer size | — | 150 mm[4] |
| Convertible to 8 inch wafer size | — | Yes[4] |
| Vintage | — | 01.06.1995[4] |
| Make | — | KLA[5] |
| Equipment type | — | Prober[5] |
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