Comparison ledger
Agilent 11980 A, Keysight 5517 A, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | 5517 AKeysight |
|---|---|---|
| OEM | Agilent | Keysight |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Keysight 5517 |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[1] | — |
| Configuration | — | Compatible with ASML PAS 2500 / 5000 Part Number: 4022 502 25005[2] |
| Compatible with Canon Part Number | — | BG 9 1304[3] |
| Laser type | — | Class II helium-neon laser[4] |
| Wavelength | — | 633 nm[4] |
| Application | — | Precision dual-frequency interferometry[4] |
| Max linear velocity | — | 411 mm/s[4] |
| Reference frequency | — | 316 MHz[4] |
| Min output power | — | 1.5 to 2.0 µW[4] |
| Warm-up time | — | < 10 minutes[4] |
| Laser beam output diameter | — | 6 mm[4] |
| Mean time between failures (MTBF) | — | > 50,000 hours typical[4] |
| Vacuum wavelength stability | — | 2 ppb (1 hour); 20 ppb (lifetime)[4] |
| Wavelength accuracy | — | ± 0.1 ppm standard; ± 0.02 ppm with optional calibration[4] |
| Required power supply voltage | — | 15 V[4] |
| Compatible power supply model | — | Keysight 10884B supply or equivalent[4] |
Plan your fab
Building a Precision Optics process? Get a complete equipment list.
Open the fab equipment planner →