Comparison ledger
Agilent 11980 A, Optorun OTFC 1300 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | OTFC 1300 OpticalOptorun |
|---|---|---|
| OEM | Agilent | Optorun |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Optorun OTFC 1300 |
| Cited variants | — | |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[3] | — |
| Configuration | — | Windows 10 Pro[4] |
| OEM | — | Optorun[4] |
| Model | — | OTFC 1300[4] |
| Equipment type | — | Optical Coater[4] |
| Series | — | OTFC series[1] |
| Technology | — | ion-assisted technology[1] |
| Applications | — | AR coatings; optical filters such as edge filters and band pass filters[1] |
| Vacuum chamber | — | SUS304, φ1300mm×1610mm (H)[1] |
| Substrate dome size | — | φ1130mm[1] |
| Substrate dome rotation speed | — | 10 rpm to 50 rpm (variable)[1] |
| Optical film thickness control system | — | HOM2-R-VIS350A High-precision Optical Monitor[1] |
| Wavelength range | — | 350nm to 1100nm[1] |
| Crystal film thickness monitor | — | XTC/3 plus 6-point rotary sensor[1] |
| Evaporation source | — | EB source: 2 units[1] |
| Ion source | — | 17 cm RF ion source[1] |
| Vacuum system | — | Roughing Pump, 2 Diffusion Pumps + Polycold or 2 Cryo Pumps + Cryo Trap[1] |
| Ultimate pressure | — | 7.0×10^-5 Pa or lower[1] |
| Pump down rate | — | 15 minutes (Atm. to 1.3×10^-3 Pa)[1] |
| Substrate heater | — | 350℃ (max.)[1] |
| Dimensions | — | 5000mm (W)×6500mm (D)×3500mm (H) approx.[1] |
| Power requirements | — | 3-phase, 200V, 50/60Hz, 100kVA approx.[1] |
| Cooling water flow rate | — | 140ℓ/min. or greater[1] |
| Compressed air pressure | — | 0.5MPa or higher[1] |
| Gross weight | — | 8500kg approx.[1] |
| Control system | — | Windows 10 Pro[4] |
| Included component | — | Brooks Polycold[4] |
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