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0010-03254 E ChuckversusElite 300

Applied Materials 0010-03254 E Chuck, Cascade Microtech Elite 300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
Elite 300Cascade Microtech
OEMApplied MaterialsCascade Microtech
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Cascade Microtech Elite 300
Cited variants—
  • ELITE 300/AP[1]
Specifications
Wafer size—12 inch[2]
Chuck material—Nickel plated aluminum[3]
Chuck type—Femtoguard temperature chuck[2]
Software—Velox 3.2[3]
Microscope—eVue III pro Digital Microscope[3]
Objective—10X Mitutoyo Plan Apo Objective[3]
Microchamber—Included[1]
Cooling unit—ATT C60-60 Cooling Unit[3]
Temperature control unit—ATT CMI Temp Control Unit[3]
Automation—Semi-automatic[1]
AttoGuard—Included[1]
PureLine—Included[1]
Performance—Precision Low Noise[2]
Platform type—probe station platform[1]
Operation—semi-automatic[1]
Technologies—MicroChamber, AttoGuard, and PureLine technologies[1]
Chuck—precision low-noise Femtoguard temperature chuck[2]
Sources (3)Every fact above is drawn from these public sources
  1. [1]electronicsdatasheets.comelectronicsdatasheets.com
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing