Comparison ledger
Applied Materials 0010-03254 E Chuck, Mattson AST 2800, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | AST 2800Mattson |
|---|---|---|
| OEM | Applied Materials | Mattson |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Mattson AST 2800 |
| Specifications | ||
| Manufacturer | — | Mattson[1] |
| Model | — | AST 2800[1] |
| Category | — | Thermal / Diffusion[2] |
| System type | — | rapid thermal process system[3] |
| Configuration | — | SMIF RTP[2] |
| Control software | — | DOS 2.0[2] |
| Wafer handling | — | PRI Robot ATM307[2] |
| Phase | — | 3 phase[2] |
| Configuration / options | — | Refurbished[3] |