Comparison ledger
Applied Materials 0010-03485 Magnet Assy, KLA M Gage 300 Film Thickness, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03485 Magnet AssyApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-03485 Magnet Assy | KLA M Gage 300 Film Thickness |
| Specifications | ||
| Configuration | WP AL 300mm PVD[1] | — |
| OEM | Applied Materials[1] | — |
| Model | 0010-03485[1] | — |
| Description | MAGNET ASSY, WP AL 300MM PVD[2] | — |
| Process | PVD[3] | — |
| Wafer size | 300mm[4] | — |
| Version | Spares[4] | — |
| Part Number | 0010-03485[1] | — |
| Manufacturer | Applied Materials[1] | — |
| Process Type | PVD (Physical Vapor Deposition)[1] | — |
| Application (Material) | Aluminum (AL)[1] | — |
| Wafer Diameter (associated) | 300 mm[1] | — |
| Measurement principle | — | Non-contact Eddy Current measurement[5] |
| Sheet resistance range | — | 1 ohm/sq to 1,999 ohm/sq; 1 mOhm/sq to 1,999 mOhm/sq[5] |
| Film thickness range | — | 100 Angstroms min to 270K Angstroms (calculated by DDC when resistivity is 2.7 uOhm-cm)[5] |
| Substrate diameter | — | 2”, 3”,4”,5”,6” standard wafers; 150mm (6”) wafers[6] |
| Substrate thickness | — | 200mm to 1000mm[6] |
| Repeatability | — | Total repeatability is the standard deviation percent of mean value, +/-1 count: 1 to 100 mOhm/sq and Ohm/sq: 1.0%; 100 to 500: 2.0%; 500 to 1,000: 4.0%; 1,000 to 1,999: 6.0%[6] |
| Display | — | 3 ½ Digit LED display, autoranges over three decades[5] |
| Measurement modes | — | Manual and Automatic modes; 5-point and 9-point multi-point measurements supported[6] |
| Units of measurement | — | Ohms per square or milliohms per square, switch selectable[5] |
| Resistivity range | — | 0.05 mOhm-cm to 100 mOhm-cm or 0.05 Ohm-cm to 100 Ohm-cm (for a 500 micrometer wafer)[6] |
| Power requirements | — | 110Vac, 50-60Hz, <15A[5] |
| Dimensions | — | Tester: 24cm (9.5”)W x 19cm (7”)H x 39cm (15.5”)D[5] |