Waferpedia

Comparison ledger

0010-13622 RF Match forversusAMC 7821 EPI

Applied Materials 0010-13622 RF Match for, Applied Materials AMC 7821 EPI, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
AMC 7821 EPIApplied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forApplied Materials AMC 7821 EPI
Cited variants—
  • AMC 7821 EPI[1]
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[2]—
Model0010-13622[2]AMC 7821[1]
Product TypeRF Match for PVD (Physical Vapor Deposition)[2]—
FeatureHigh Efficiency HE RF Match-Bias[2]—
Wafer size—6 inch[1]
Process type—Epitaxial silicon deposition[1]
OEM—Applied Materials[1]
Process—Epitaxial Silicon Deposition[1]
Vintage—1983[1]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing