Comparison ledger
Applied Materials 0010-13622 RF Match for, Applied Materials Producer GT DARC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | Producer GT DARCApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Applied Materials Producer |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | 3 Channels[2] |
| Model | 0010-13622[1] | — |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Gas | — | SiH4, N2O, NH3[2] |
| FOUP Ports | — | 4[2] |
| Number of channels | — | 3[2] |
| Process gases | — | SiH4, N2O, NH3[2] |
| Number of FOUP ports | — | 4[2] |
| Chiller model | — | SMC HRW008-H1S-DY-X007[2] |
| Power supply type 1 | — | Advanced Energy Apex 3013 (x6)[2] |
| Power supply type 2 | — | Advanced Energy /PDX 900 (x6)[2] |
| Power supply type 3 | — | MKS Astron 2L (x6)[2] |
| Vintage | — | 2016[2] |
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