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0010-13622 RF Match forversusEagle 10 Trident

Applied Materials 0010-13622 RF Match for, ASM Eagle 10 Trident, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forASM Eagle 10 Trident
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]—
Model0010-13622[1]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Process—PECVD (Plasma-Enhanced Chemical Vapor Deposition)[2]
Wafer Size—6 inch[3]
Wafer Sizes—6 inch, 8 inch[2]
Vintage—2003[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing