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0010-18024 Pyrometer AssemblyversusAtlas 1000-00493 Metrology

Applied Materials 0010-18024 Pyrometer Assembly, Onto Innovation Atlas 1000-00493 Metrology, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyOnto Innovation Atlas 1000-00493 Metrology
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Lamp / Wavelength:[2]
Robot—Kawasaki Linear Track Type[2]
Loader—Dual TDK E3 FOUP[2]
SR—vis Halogen (400-780 nm)[2]
SE—Xe 210-1000nm (small spot)[2]
Operation System—Windows XP[2]
Stage—X,Y,Z,T[2]
Manufacturer—Onto Innovation[3]
Model—Atlas 1000-00493 Metrology[2]
Wafer sizes—8-inch, 12-inch[2]
Lamp / wavelength, SR—vis Halogen (400-780 nm)[2]
Lamp / wavelength, SE—Xe 210-1000nm (small spot)[2]
Spot size, SR 15X/10X—can measure 30x30um / 4x: 50 x 50um pad[2]
Spot size, SE UV/vis (Xe)—can measure 50um x 50 um pad[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com