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0010-22161 High EFF RF MatchversusDFD 620

Applied Materials 0010-22161 High EFF RF Match, Disco DFD 620, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
DFD 620Disco
OEMApplied MaterialsDisco
Category——
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FamilyApplied Materials 0010-22161 High EFF RF MatchDisco DFD
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Voltage—200 V[3]
Configuration—N2[3]
Phase—3 Phase[3]
Power—4 KVA[3]
Spindle Maximum Revolution—60,000 rpm[3]
Vintage—1995[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing