Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, KLA OP 2600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | OP 2600KLA |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1994 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | KLA OP 2600 |
| Specifications | ||
| Make | Applied Materials[1] | KLA / Therma-wave[3] |
| Model | 0010-22161[1] | OP 2600[3] |
| Description | HTESC PH 1 REV A[2] | Thin film measurement[5] |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| P/N | — | 5A-80-00-0007-10[3] |
| Configuration | — | Refurbished[3] |
| Tool name | — | Thermawave OP2600[4] |
| Wafer size | — | 8 inch[4] |
| Vintage | — | 1994-12[4] |
| Tool condition | — | Refurbished[4] |
| Cassette loader stations | — | Two[4] |
| Optical source | — | 675 nm thermoelectrically cooled diode laser[4] |
| Spectrometry light source | — | 450 to 840 nm tungsten halogen lamp[4] |
| Measurement modes | — | Beam Profile Reflectometry (BPR), Beam Profile Ellipsometry (BPE), and spectrometry[4] |