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0010-22161 High EFF RF Matchversus870 S SRD

Applied Materials 0010-22161 High EFF RF Match, Semitool 870 S SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
870 S SRDSemitool
OEMApplied MaterialsSemitool
Category——
Wafer size——
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FamilyApplied Materials 0010-22161 High EFF RF MatchSemitool 870
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]870 S[5]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—120 Volts AC[3]
Phase—1 Phase[3]
Voltage—120 Vac[4]
Type—Spin Rinse Dryer (SRD)[5]
Manufacturer—Semitool[5]
Wafer size—6 inch (6")[3]
Electrical supply—120 VAC, 1 phase, 3 wire[3]
Frequency—50/60 Hz[3]
Vintage—2005[3]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing