Waferpedia

Comparison ledger

0010 47763versusDPS II CIP

Applied Materials 0010 47763, Applied Materials DPS II CIP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010 47763Applied Materials
DPS II CIPApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010 47763Applied Materials DPS
Specifications
Configuration2nd Source New[1]4x (D4) SILICON DPS II chamber, 12 Gas line (Standard Gas Line)[4]
TypeMonopolar Dual Heated[2]—
DescriptionASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3]—
Possible MaterialsAl2O3 (aluminum oxide) or AlN (aluminum nitride)[2]—
Model0010-47763[1]DPS II CIP[4]
OEMApplied Materials[1]Applied Materials[4]
Material (possible)Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2]—
ApplicationFixing wafers in etching process (PVD, CVD, ETCH)[2]—
Quantity available (source)1[2]—
Applicable—2 Chiller[4]
Not applicable—Scrubber, Dry Pump[4]
Category—Etch[5]
Tool type—Etcher[5]
Chamber—4x (D4) SILICON DPS II chamber[4]
Gas line—12 Gas line (Standard Gas Line)[4]
Chiller—2 Chiller applicable[4]
Scrubber—Not applicable[4]
Dry pump—Not applicable[4]
Vintage—2005[4]

Plan your fab

Building a Etch process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]saulcontrol.comsaulcontrol.com
  3. [3]getspares.comgetspares.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com