Waferpedia

Comparison ledger

0020 18455 PartversusConcept One

Applied Materials 0020 18455 Part, Lam Research Concept One, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
Concept OneLam Research
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartLam Research Concept One
Cited variants—
  • 6 inch version[1]
  • 8 inch version[2]
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[3]Nitride / TEOS[1]
Phase—3 Phase[1]
Voltage—208V Vac[1]
Host Interface—SECS-[7]
Gas Box Type—External[7]
EMO's—Push Button[7]
One Arm Robot—Lift, Rotate Motor[7]
Wafer size 6 inch—6 inch[1]
Wafer size 8 inch—8 inch[2]
Process types—Nitride, TEOS, TEOS-R[1]
Power requirements—208V, 50/60 Hz, 3 Phase[1]
Vintage year—2012[2]
Processes—Nitride, TEOS[1]
Wafer size—6 inch[1]
Power supply—208V, 50/60 Hz, 3-phase[1]
Vintage (example unit)—2012[2]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing