Waferpedia

Comparison ledger

0041-39086 ESC PartversusEnabler

Applied Materials 0041-39086 ESC Part, Applied Materials Enabler, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
EnablerApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2010 Vintage
Control system——
Generation——
Family—Applied Materials Enabler
Cited variants—
  • Centura AP Enabler E5[1]
  • Centura AP Enabler FEOL-E5[2]
Specifications
Manufacturer—Applied Materials[3]
Model—Enabler[3]
Category—Etcher[3]
Wafer size—12 inch[3]
Description—Dielectric etcher[1]
Process chambers—4[1]
Version—300 mm[1]
Configured wafer size—300 mm[4]
Process—OX[4]
Software revision—B2.8_79[4]
FI software—FB4.70_12[4]
GEM software—7.20_17[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]Equipment inventory listing
  4. [4]tarasemi.comtarasemi.com