Waferpedia

Comparison ledger

0041-39086 ESC PartversusSEZ 203 Spin Processor /

Applied Materials 0041-39086 ESC Part, Lam Research SEZ 203 Spin Processor /, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research SEZ 203 Spin Processor /
Specifications
Category—Etch[1]
Wafer size—8 inch[2]
Wafer handling—Bernoulli wafer handling, Bernoulli chuck, Bernoulli grippers[3]
Open cassettes—Two open cassettes[3]
Chemical cabinets—3 chemical cabinets (CDS)[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]tech-semi.comtech-semi.com