Comparison ledger
Applied Materials Endura 5500 IMP, CHA Mark 50, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Endura 5500 IMPApplied Materials | Mark 50CHA |
|---|---|---|
| OEM | Applied Materials | CHA |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Endura 5500 | CHA Mark 50 |
| Specifications | ||
| Software Version | B8.01[2] | — |
| Wafer Type | Notch[2] | — |
| Configuration | No SMIF Interface2 x OD[2] | updated to control the deposition and chambers.[4] |
| Line Frequency | 50 Hz[2] | — |
| Line Voltage | 200-208 V[2] | — |
| Line Amperage | 320 A[2] | — |
| Make | Applied Materials[2] | — |
| Model | Endura 5500 IMP[2] | — |
| Category | Deposition[3] | — |
| Wafer Sizes | 8 inch[2] | — |
| PVD type | Physical Vapor Deposition[2] | — |
| No SMIF Interface | 2 x OD[2] | — |
| Vacuum | CTI 9600 Cryo compressor (2)[3] | — |
| Chamber A | Pre-Clean Chambers[2] | — |
| Chamber B | Cool Down Chamber[2] | — |
| Chamber C | Chamber C[2] | — |
| Chamber D | Chamber D[2] | — |
| Chamber E | Degas/Orienter Chamber[2] | — |
| Chamber F | Degas/Orienter Chamber[2] | — |
| Chamber 1 | Chamber Process: PC II[2] | — |
| Chamber 2 | Chamber Process: IMPTiN; Rough Pump Not Included[2] | — |
| Chamber 3 | Chamber Process: IMPTiN; Rough Pump Not Included[2] | — |
| Buffer Chamber | Robot: HP 2000 Vintage[2] | — |
| Chamber 1 process | IMPTiN[2] | — |
| Chamber 2 process | IMPTiN[2] | — |
| Chamber 3 process | IMPTiN[2] | — |
| Loadlock Type | Wide Body L/L[2] | — |
| Chamber Process | PC II[2] | — |
| Robot | HP[2] | — |
| Process type | — | Physical Vapor Deposition (PVD)[5] |
| Wafer size | — | 6 inch[5] |
| Deposition type | — | Thin-film deposition[6] |
| Control upgrade | — | Computer added to track processes[4] |
| Power supply upgrade | — | New Glassman voltage supply[4] |
| Controller upgrade | — | Updated Infinicon controller[4] |
Plan your fab
Building a Deposition process? Get a complete equipment list.
Open the fab equipment planner →