Waferpedia

Comparison ledger

Mirra Integraversus120 Continuous

Applied Materials Mirra Integra, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Mirra IntegraApplied Materials
OEMApplied MaterialsLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones1999 Vintage year—
Control system——
Generation——
FamilyApplied Materials MirraLapmaster 120 Continuous
Specifications
ConfigurationPoly / STI[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing