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Comparison ledger

P 5000 Mark II Dielectricversus1512e

Applied Materials P 5000 Mark II Dielectric, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
P 5000 Mark II DielectricApplied Materials
1512eTegal
OEMApplied MaterialsTegal
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials P 5000 Mark IITegal 1512e
Specifications
ConfigurationMxP+[1]—
OEMApplied Materials[1]—
ModelP 5000 Mark II[1]—
Tool typeDielectric Etch[1]Industrial RIE plasma etcher system[3]
Wafer size6 inch[1]—
Stated configuration—With modules assembly for CI-4222[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com