Waferpedia

Comparison ledger

Eagle XP 5versus1 WBS 1 Wafer Substrate

ASM Eagle XP 5, Logitech 1 WBS 1 Wafer Substrate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMASMLogitech
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASM EagleLogitech 1 WBS 1 Wafer Substrate
Specifications
ConfigurationPE-ALD System Mainframe[1]—
Phase3 Phase[2]—
Full Load Amps130 A[2]—
MakeASM[1]—
ModelEagle XP 5[1]—
DescriptionBonder[1]—
PowerAC190-220V[2]—
Frequency50/60Hz[2]—
Current25 KA[1]—
Control & softwarewith PC & software[1]—
Software VersionEagle I ASMJ software (Windows embedded XP / OS)[3]—
Failure modeFaulty throttle valve in 2nd chamber[1]—
Vintage2010[1]—
Wafer Size—6 inch[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing