Comparison ledger
Axcelis 17099370 Outer strike plate, Ulvac SOPHI 200 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 17099370 Outer strike plateAxcelis | SOPHI 200 IonUlvac |
|---|---|---|
| OEM | Axcelis | Ulvac |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 17099370 Outer strike plate | Ulvac SOPHI 200 Ion |
| Specifications | ||
| Configuration | Used with Axcelis GSD 200[1] | — |
| Manufacturer | Axcelis[2] | — |
| Model | 17099370 Outer strike plate[1] | — |
| Part number | OEM number 17099370[2] | — |
| Used with | Axcelis GSD 200[1] | — |
| Condition | NEW[2] | — |
| Dose range (actual dose | — | 1010~1014 ions/cm2)[3] |
| Beam current (~500μA) - Throughput | — | more than 100 pieces/h (6in)[3] |
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