Comparison ledger
Axcelis 200 ACU, Lam Research Alliance 6 9400 PTX, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Alliance 6 9400 PTXLam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research Alliance |
| Specifications | ||
| Configuration | Parts Machine[1] | 3 Chamber[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Voltage | — | 208 VAC[6] |
| Full Load Current | — | 43 Amps[6] |
| Capacity of Main Breaker | — | 10 kA[6] |
| Wafer Size | — | 8 inch[5] |
| Number of Chambers | — | 3 Chamber[5] |
| Frequency | — | 50/60 Hz[6] |
| Operating System | — | Upgraded to Windows 7[6] |
| Endpoint Detection | — | OES (Optical Emission Spectroscopy)[6] |
| Chamber Type | — | Poly Etch Chambers[6] |
| Number of Poly Etch Chambers | — | All 3[6] |
| Vintage | — | 2000[6] |
| Asset # | — | 132832[7] |
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