Waferpedia

Comparison ledger

0 V 500versusKokusai DJ 1206 V DF LPCVD

Blue M 0 V 500, Hitachi Kokusai DJ 1206 V DF LPCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
OEMBlue MHitachi
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Hitachi Kokusai DJ 1206 V DF LPCVD
Specifications
Manufacturer—Hitachi Kokusai[1]
Model—DJ 1206 V DF[1]
Type—Low Pressure Chemical Vapor Deposition (LPCVD) Furnace[1]
Wafer Size—12 inch[1]
Year—2007[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing