Waferpedia

Comparison ledger

017-0024-01 Prealignerversus800

Brooks 017-0024-01 Prealigner, OAI 800, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
800OAI
OEMBrooksOAI
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerOAI 800
Specifications
Tool type—Aligner[1]
Equipment section—Lithography[1]
Tool name—OAI 800[2]
Serial number—1398[2]
Align type—Backside[2]
017-0024-01 Prealigner entry800 entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]nanofab.utah.edunanofab.utah.edu