Comparison ledger
Brooks ABM ATM 405 Atmospheric Wafer Handling Robot, Dek 03 iX Automatic, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | Brooks | Dek |
| Category | Assembly / SMT | Assembly / SMT |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks ABM ATM | Dek 03 iX Automatic |
| Specifications | ||
| Configuration | Single Arm[1] | — |
| Manufacturer | Brooks[1] | — |
| Make | Brooks / PRI[2] | — |
| Model | ABM / ATM 405[2] | — |
| Tool type | Atmospheric wafer handling robot[2] | — |
| Wafer sizes | 612 inch[2] | — |
| Vintage | — | 2020[3] |
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