Comparison ledger
Bruker D 8, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | D 8Bruker | |
|---|---|---|
| OEM | Bruker | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker D 8 | KLA .204 PSL Wafer |
| Cited variants | — | |
| Specifications | ||
| Configuration | Cu rotating anode[4] | NIST Traceable[6] |
| X-ray source (D8 Discover) | High-efficiency Turbo X-ray source (TXS-HE)[1] | — |
| Goniometer (D8 Discover) | High-accuracy ATLAS goniometer with non-coplanar arm[1] | — |
| X-ray tube (general D8) | Copper rotating anode (CuKα)[4] | — |
| X-ray wavelength (D8 Venture) | Mo 0.71 Å, Cu 1.54 Å[2] | — |
| Geometry (D8 Venture) | Four-circle kappa geometry (7 μm sphere of confusion)[2] | — |
| Detector (D8 Venture) | Photon 100 detector (100 cm², 1024x1024 pixels)[2] | — |
| Detector (D8 Discover) | Eiger R 250k (OD, 1D, 2D modes, 38.4x38.4 mm, 75 μm pixel)[1] | — |
| X-ray tube wavelength (general D8) | CuKα = 1.5418 Å[5] | — |
| Detector (general D8) | LYNXEYE compound silicon strip detector, resolution 0.008°[5] | — |
| High-resolution detector (general D8) | Resolution ~0.0035° for single crystals and thin films[5] | — |
| Maximum X-ray generator power (general D8) | 50 kV, 60 mA[5] | — |
| Wafer Size | — | 8 inch[6] |
| Traceability | — | NIST[7] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[6] |
| NIST Traceable | — | Yes[6] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →