Waferpedia

Comparison ledger

Ecomet 3versus120 Continuous

Buehler Ecomet 3, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Ecomet 3Buehler
OEMBuehlerLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler Ecomet 3Lapmaster 120 Continuous
Specifications
Configuration100-115 Volts[1]—
Product typeGrinder / Polisher[2]—
Voltage100-115 Volts[1]—
Frequency50/60 Hz[1]—
PhaseSingle phase[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing